Patent · US Expired

Sensor for determining the state of parameters on mechanical components while using amorphous carbon layers having piezoresistive properties

US7073390B2 · kind B2 · utility

6Cited by
3References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 8, 2001
Grant dateJul 11, 2006
Priority date
Expiry dateMay 21, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2203/0623
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The present invention relates to a sensor for measuring actual loads acting upon a surface of a mechanical component, wherein as a sensor an amorphous hydrocarbon layer with piezoresistive properties is used, which is preferably doped with at least one metallic and/or non-metallic element and is connected by contacts to a measuring device; the present invention further relates to the use of carbon layers having piezoresistive properties and preferably doped with metallic and/or non-metallic elements as a sensor for load measurements, as well as to a method of measuring actual loads at stressed surfaces of mechanical components, wherein as a measuring sensor an amorphous carbon layer preferably doped with metallic and/or non-metallic elements is used.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.