Sensor for determining the state of parameters on mechanical components while using amorphous carbon layers having piezoresistive properties
US7073390B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 8, 2001 |
| Grant date | Jul 11, 2006 |
| Priority date | — |
| Expiry date | May 21, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0623
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a sensor for measuring actual loads acting upon a surface of a mechanical component, wherein as a sensor an amorphous hydrocarbon layer with piezoresistive properties is used, which is preferably doped with at least one metallic and/or non-metallic element and is connected by contacts to a measuring device; the present invention further relates to the use of carbon layers having piezoresistive properties and preferably doped with metallic and/or non-metallic elements as a sensor for load measurements, as well as to a method of measuring actual loads at stressed surfaces of mechanical components, wherein as a measuring sensor an amorphous carbon layer preferably doped with metallic and/or non-metallic elements is used.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.