Patent · US Expired

Charged particle deflecting system

US7075075B2 · kind B2 · utility

7Cited by

26References

43Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Pavel Adamec · Haar, DE
Harry Munack · Heimstetten, DE

Key dates

Filing date	Jun 18, 2004
Grant date	Jul 11, 2006
Priority date	—
Expiry date	Jun 18, 2024

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/1536
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention provides a deflecting system for deflecting a charged particle beam from a first direction to a second direction, the deflecting system comprising a first deflector for deflecting said charged particle beam off the first direction within a first deflection plane; a second deflector for deflecting the deflected charged particle beam into the second direction within the first deflection plane; and at least one deflecting pair of correcting coils comprising two correction coils which is positioned and shaped to reduce an astigmatism of the charged particle beam caused by the deflections.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.