Injection pinch discharge extreme ultraviolet source
US7075096B2 · kind B2 · utility
4Cited by
6References
27Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 4, 2004 |
| Grant date | Jul 11, 2006 |
| Priority date | — |
| Expiry date | Oct 26, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0035
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A source of extreme ultraviolet or soft X-ray photon source includes discharge chamber containing a buffer gas, first and second electrodes in the discharge chamber configured to deliver a heating current to a plasma discharge region, and an injector to project a particle of a working substance into the plasma discharge region. The particle is evaporated and ionized by the heating current to form a hot plasma that radiates extreme ultraviolet or soft X-ray photons.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.