Method for three-dimensional inspection using patterned light projection
US7075662B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 2001 |
| Grant date | Jul 11, 2006 |
| Priority date | — |
| Expiry date | May 16, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/8806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A three-dimensional inspection system and method is used to obtain information about three-dimensional articles with specular surfaces having a shape and positive or negative height by projecting a pattern of light onto the articles at an oblique angle. The system includes a patterned light projector with optical axis disposed at an oblique angle with respect to the plane of the article being inspected, an extended light source, and an image detector disposed above the article to detect the image of the pattern on the article. The light pattern includes lines with a substantially equal thickness and spacing. The spacing of the lines is greater than a spacing or pitch of the specular elements. An image processor, coupled to the image detector, receives the image, locates the lines, and measures the lateral shift of the lines. Height information is determined from the lateral shift and projection angle using triangulation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.