Compensator for radially symmetric birefringence
US7075721B2 · kind B2 · utility
3Cited by
2References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2003 |
| Grant date | Jul 11, 2006 |
| Priority date | — |
| Expiry date | Mar 4, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70958
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A birefringence correction is incorporated into an optical imaging system for imaging with deep ultraviolet light. Optical elements which exhibit an intrinsic birefringence with deep ultraviolet light are arranged in a fashion that renders accumulated birefringence less sensitive to the angular orientation of the beam's rays around the optical axis. A compensating optic corrects a residual radially symmetric component of the birefringence.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.