Differential pressure measurement using backside sensing and a single ASIC
US7077008B2 · kind B2 · utility
26Cited by
13References
11Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 23, 2004 |
| Grant date | Jul 18, 2006 |
| Priority date | — |
| Expiry date | Sep 16, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Differential pressure sensor systems and methods are disclosed, including an absolute pressure sensor composed of a plurality of pressure sense die for detecting sensed media, wherein each of the pressure sense die possess a back side and a front side and are respectively associated with a plurality of varying pressures. The sensed media are applied only at the backside of the pressure sense die, thereby preventing wire bonds and active regions associated with the front side of the pressure sense die from exposure to sensed media and attack from acids and abrasive chemicals associated with the sensed media.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.