Patent · US Expired

Reflecting device for electromagnetic waves

US7077533B2 · kind B2 · utility

3Cited by

7References

11Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Martin Weiser · Sinsheim, DE
Udo Dinger · Oberkochen, DE
Siegfried Stacklies · Aalen, DE
Markus Haidl · Aalen, DE

Key dates

Filing date	May 28, 2002
Grant date	Jul 18, 2006
Priority date	—
Expiry date	May 28, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG21K1/06
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A device serves for reflecting electromagnetic waves, in particular in a length range less than 200 nm. It has a mirror carrier made of a material with at least approximately vanishing thermal expansion and at least one reflective layer applied on said mirror carrier. An intermediate layer made of a material which is formed such that its surface roughness is not significantly increased after beam processing methods is fitted between the mirror carrier and the reflective layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.