Patent · US Expired

Micro-machining employing multiple independently focused and independently steered beams

US7078650B2 · kind B2 · utility

14Cited by

47References

26Claims

0Family size

Assignee

Orbotech Ltd. · IL

Inventors

Abraham Gross · Rehovot, IL
Zvi Kotler · Tel Aviv-Yafo, IL
Eliezer Lipman · Rishon LeZion, IL
Dan Alon · Nes Ziona, IL

Key dates

Filing date	Dec 23, 2003
Grant date	Jul 18, 2006
Priority date	—
Expiry date	Jan 18, 2024

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB23K2103/172
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.