Vertical unipolar component
US7078783B2 · kind B2 · utility
7Cited by
2References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 29, 2004 |
| Grant date | Jul 18, 2006 |
| Priority date | — |
| Expiry date | Oct 19, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/668
Abstract
A vertical unipolar component formed in a semiconductor substrate. An upper portion of the substrate includes insulated trenches filled with a vertical multiple-layer of at least two conductive elements separated by an insulating layer, the multiple-layer depth being at most equal to the thickness of the upper portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.