Measurement device for non-contact detection of oscillations of an object
US7079258B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2003 |
| Grant date | Jul 18, 2006 |
| Priority date | — |
| Expiry date | Dec 29, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M15/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measurement device for oscillation measurement, as well as a corresponding method, is proposed, wherein the oscillation measurement is performed by at least one laser interferometer (2, 3), whose measurement beam is directed onto various measurement points (5) of the object (1) for generating a scanning movement, and the obtained oscillation data is correlated with the position data of the respective measurement point (5) and evaluated or displayed. In particular, for three-dimensional measurements, the invention reduces the measurement complexity because the scanning device is a robot arm, which moves a measurement head of the laser interferometer to the desired measurement points on the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.