Compact microcolumn for automated assembly
US7081630B2 · kind B2 · utility
17Cited by
13References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2004 |
| Grant date | Jul 25, 2006 |
| Priority date | — |
| Expiry date | May 9, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/1205
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microcolumn including an assembly substrate and a plurality of beam modification components. The assembly substrate includes a plurality of sockets, and the beam modification components each include a connector coupled to a corresponding one of the sockets. Assembly of the beam modification components to the assembly substrate may employ automation and/or automated calibration, including automated motion of robotic stages in a substantially automated manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.