Patent · US Expired

Quartz glass blank for an optical component, and manufacturing procedure and use thereof

US7082790B2 · kind B2 · utility

2Cited by

7References

15Claims

0Family size

Assignee

HERAEUS QUARZGLAS GMBH & CO. KG · DE

Inventors

Bodo Kühn · Gütersloh, DE
Bruno Uebbing · Alzenau, DE
Martin Trommer · Bitterfeld-Wolfen, DE
Stefan Ochs · Bad Camberg, DE
Gero Fischer · Kleinwallstadt, DE
Ulla Holst · Stuttgart, DE

Key dates

Filing date	Dec 5, 2002
Grant date	Aug 1, 2006
Priority date	—
Expiry date	Jan 21, 2024

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P40/57
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a wavelength of 250 nm or shorter. Moreover, the invention relates to a procedure for manufacture of the quartz glass blank. A quartz glass blank of the described type should show little induced absorption and be optimized with respect to compaction and decompaction. The quartz glass blank according to the invention is characterized by the following properties:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.