Test gas leakage detector
US7082813B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 12, 2002 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Jan 27, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/202
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test gas leakage detector includes an inlet for gases to be analyzed for the presence of a test gas, a test gas detector and a first high vacuum pump connected to the test gas detector. An intermediate inlet is arranged on the first high vacuum pump that is used to supply the gases to be analyzed for the presence of a test gas. A fore-vacuum pump is connected to the first high vacuum pump and a line section fitted with a valve is located between the inlet and the fore-vacuum pump. In order to provide greater sensitivity and a quicker result time, a second high vacuum pump is provided between the inlet and the intermediate inlet. The second high vacuum pump has an outlet which is connected to the inlet of the fore-vacuum pump by means of a line section fitted with a valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.