Vibrating pumping stage for molecular vacuum pumps, and molecular vacuum pump with vibrating pumping stages
US7083398B2 · kind B2 · utility
1Cited by
7References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 10, 2003 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Jul 8, 2024 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B45/047
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A micro-electro-mechanical vibrating pumping stage comprises a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) with a vibrating membrane and a device controlling the membrane in order to provide its oscillation with respect to the substrate. A molecular vacuum pump incorporates this vibrating pumping stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.