Composition used in producing calcium-rich getter thin film
US7083825B2 · kind B2 · utility
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24References
15Claims
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Key dates
| Filing date | Apr 8, 2004 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Nov 22, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J7/183
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An improved getter device and method for forming a calcium-rich getter thin film in an electronic vacuum device is disclosed. The getter device includes a powder of a Ca—Ba—Al ternary alloy composed of between 53% and 56.8% by weight of aluminum, from 36% to 41.7% by weight of calcium and from 1.5% to 11% by weight of barium. The method allows the formation of a calcium-rich getter thin film with a substantially reduced amount of released hydrogen in the vacuum device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.