Polycyclic fluoroalkanes
US7084314B1 · kind B1 · utility
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14Claims
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Key dates
| Filing date | Jun 9, 2005 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Jun 9, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07C2603/86
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Polycyclic fluoroalkanes that are highly transparent to UV wavelengths ranging from about 190 nm to 260 nm are provided. The polycyclic fluoroallkanes are suitable for use in a variety of applications, particularly in the vacuum UV and deep UV region of the electromagnetic spectrum. For example, the polycyclic fluoroalkanes are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.