Thin membrane transducer
US7086288B2 · kind B2 · utility
22Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 2003 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Nov 26, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R7/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transducer includes a substrate and a thin membrane having a shape that can be deflected relative to the substrate to provide an amount of membrane deflection useful for sensing or actuation purposes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.