Heat sink with carbon nanotubes and method for manufacturing same
US7086451B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 28, 2004 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Jul 28, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4935
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A heat sink (11) includes a base (12), a plurality of fins (14) extending from a first surface of the base, and a plurality of carbon nanotubes (18) formed on an opposite second surface (16) of the base. The carbon nanotubes are substantially parallel to each other and substantially perpendicular to the base. A method for manufacturing the heat sink includes the steps of: (a) providing a heat sink preform comprising a base and a plurality of fins extending from a first surface of the base; (b) polishing an opposite second surface of base; (c) depositing a catalyst film on the second surface of the base; and (d) providing a carbon source gas to grow a plurality of carbon nanotubes on the second surface of the base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.