Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system
US7086822B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 2, 2002 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Dec 2, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67766
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
An SCARA type robot comprises: an arm unit (14), whose one end is linked to a base (11) so as to be pivotable in a horizontal plane, and which is capable of horizontally bending and stretching; wrist portions (15a, 15b) which are linked to the other end of the arm unit so as to be pivotable in a horizontal plane, and to which finger portions (16a, 16b) to hold a tabular object (7) are fixed; and a driving means for the arm unit and the wrist portions, wherein the driving means can independently turn a pivotable portion which links the wrist portions and the arm unit, a pivotable portion which bends and stretches the arm unit, and a pivotable portion which links the arm unit and the base, so that the finger portions holding the tabular object can be moved along a plurality of nearly straight through routes which are virtually parallel to each other, and can cause at least one of the pivotable portions to make one turn or more. The SCARA type robot further comprises stoppers (21a, 21b) which limit the turn of the pivotable portions capable of making one turn or more to a prescribed pivotable angle after one turn is made. By this constitution, it is made possible to move the finger po…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.