Micro-fabricated electrokinetic pump with on-frit electrode
US7086839B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2003 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Feb 23, 2024 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF28F2250/08
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An electroosmotic pump and method of manufacturing thereof. The pump having a porous structure adapted to pump fluid therethrough, the porous structure comprising a first side and a second side, the porous structure having a plurality of fluid channels therethrough, the first side having a first continuous layer of electrically conductive porous material deposited thereon and the second side having a second continuous layer of electrically conductive porous material deposited thereon, the first second layers coupled to a power source, wherein the power source supplies a voltage differential between the first layer and the second layer to drive fluid through the porous structure at a desired flow rate. The continuous layer of electrically conductive porous material is preferably a thin film electrode, although a multi-layered electrode, screen mesh electrode and beaded electrode are alternatively contemplated. The thickness of the continuous layer is in range between and including 200 Angstroms and 10,000 Angstroms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.