Method for integration of microelectronic components with microfluidic devices
US7087444B2 · kind B2 · utility
58Cited by
26References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2002 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Oct 10, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2221/68363
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of forming an integrated microelectronic device and a micro channel is provided. The method offers an inexpensive way of integrating devices that are usually incompatible during fabrication, a microchannel and a microelectronic structure such as an electro-optic light source, a detector or a MEMs device into a single integrated structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.