Photo-imageable compositions of norbornene and acrylate copolymers and use thereof
US7087691B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 7, 2003 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Jul 7, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08F232/08
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Embodiments in accordance with the present invention encompass photo-imageable compositions that include polymers of acrylate-type monomers and norbornene-type monomers. In some embodiments a catalyst system comprising a cationic or a neutral Pd(II) dimer component having the formula (Allyl)Pd(P(R21)3) or (L′)[(L)Pd(R)(X)]2, respectively is employed to effect polymerization. In other embodiments a free radical or living free radical catalyst is employed to effect polymerization. At least one of the acrylate-type monomers and norbornene-type monomers of the polymer embodiments of the present invention encompass an acid labile moiety. Some polymer embodiments of the present invention include more than one type of acrylate-type monomer and norbornene-type monomer. Embodiments of the present invention include forming a patterned layer on a substrate and some embodiments include transferring the patterned structure to a material layer first formed on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.