Monitor wafer purchase and controls database
US7089077B1 · kind B1 · utility
3Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2005 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Jul 6, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S715/961
- WIPO fieldIT methods for management
- WIPO sectorElectrical engineering
Abstract
Controlling stocker capacity in an automated facility and controlling monitor budgets by capped releases, capped FOUP supplies, and wafer reuse methodology. A Database is used to order, track, and reclaim test (monitor) wafers in the FAB. The database automatically controls the amount of FOUPs in the FAB as well as the amount of wafers released into the FAB each day. This database also interacts with the Control Center in helping to release monitor wafers in the FAB.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.