Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy
US7089787B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2004 |
| Grant date | Aug 15, 2006 |
| Priority date | — |
| Expiry date | Jul 20, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever for the use in atomic force microscopy includes a cantilever arm having a fixed end being attached to a base member and a free end where the cantilever arm has a first shape and an axis of torsion associated with the first shape, and a probe tip projecting from the cantilever arm near the free end where the probe tip is positioned in an offset displacement from the axis of torsion. Alternately, the cantilever arm has a first shape selected to tune a torsional resonance frequency of a selected torsional mode or the fundamental flexural resonance frequency of the fundamental mode so that the torsional resonance frequency and the fundamental flexural resonance frequency has an integer ratio. In this manner, the torsional motion of the torsional harmonic cantilever at that harmonic frequency will be largely enhanced by the corresponding torsional resonance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.