Process for producing dielectric layers by using multifunctional carbosilanes

US7090896B2 · kind B2 · utility

Assignee

• H.C. STARCK INC. · US

Inventors

• Stephan Kirchmeyer · Leverkusen, DE
• Detlef Gaiser · Hanau, DE
• Harald Kraus · Leverkusen, DE
• Udo Merker

Key dates

• Filing date: Dec 13, 2002
• Grant date: Aug 15, 2006
• Expiry date: May 12, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05K3/4676
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A process for producing dielectric layers with low dielectric constants by thermal treatment of a sol-gel product of a multifunctional carbosilane, corresponding layers, and their use in the production of electronic components, are described.