Optically addressed spatial light modulator (OASLM) with dielectric mirror comprising layers of amorphous hydrogenated carbon
US7092046B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 2002 |
| Grant date | Aug 15, 2006 |
| Priority date | — |
| Expiry date | May 10, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/12
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A reflective type liquid crystal optically addressed spatial light modulator has a first transparent substrate (1b), a first transparent electrode (2b) formed on the first transparent substrate (1b) and a photosensitive layer (3) formed on the first transparent electrode, formed from materials including hydrogenated amorphous silicon carbide (a-Si:C:H). A read-out light-blocking layer (4) is formed on top of the photosensor layer (3) and is formed from amorphous hydrogenated carbon (a-C:H). The high reflectance dielectric multilayer mirror (5) is formed on top of the light-blocking layer (4) and can be made of alternating the a-Si:C:H layers with a higher refractive index and the a-C:H layers with lower reflective index. The modulator also has a second transparent substrate (1a), a second transparent electrode (2a) formed on the second transparent substrate (1a), and a liquid crystal layer (8) disposed between the dielectric mirror (5) and the second transparent electrode (2a). The invention allows more efficient separation of the input and read lights and increases the read light reflection, resulting in improvements to the input sensitivity, resolution, contrast ratio, and diffra…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.