Microelectromechanical strain gauge with frequency detector
US7093498B2 · kind B2 · utility
10Cited by
12References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2003 |
| Grant date | Aug 22, 2006 |
| Priority date | — |
| Expiry date | Dec 29, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/183
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical system (MEMS) strain gauge includes at least one flexible arm that can be caused to oscillate. Transverse strain on the arm changes the resonant frequency of the arm. A detector communicating with the flexible arm may detect the frequency of oscillation to provide, an indication of the transverse strain of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.