Nanopastes for use as patterning compositions
US7094503B2 · kind B2 · utility
1Cited by
7References
87Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2003 |
| Grant date | Aug 22, 2006 |
| Priority date | — |
| Expiry date | Jan 12, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0047
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a patterned substrate and methods of forming patterns on a substrate, in which a thermally sensitive composition composed of an inorganic nanopaste is applied onto a surface of a substrate to form a layer. The layer may be imaged and developed to form a pattern area that adheres to the surface of the substrate. The patterned substrate may be used in the production of printing plates and masks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.