Oxidation-resistant conducting perovskites
US7095067B2 · kind B2 · utility
24Cited by
8References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 2003 |
| Grant date | Aug 22, 2006 |
| Priority date | — |
| Expiry date | Aug 22, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B53/30
Abstract
The present invention provides a semicondctor device that includes a conductor comprised of first and second layers of perovskite that have different stoichiometric compositions. The conductors provide a good template for the formation of dielectric layers thereon and are resistant to oxidizing environments used in semiconductor processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.