Multi-tunable microelectromechanical system (MEMS) resonators
US7095295B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 21, 2003 |
| Grant date | Aug 22, 2006 |
| Priority date | — |
| Expiry date | Feb 11, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02409
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method for tuning a vibratory device including a cantilevered resonator comprising the steps of increasing a voltage V0 supplied to the vibratory device to thereby increase the bandwidth of the vibratory device; and keeping the resonant frequency of the vibratory device at substantially that natural frequency of the cantilevered resonator, wherein the vibratory device comprises: a capacitor including a movable plate and a fixed plate spaced from each other, the movable plate being part of the cantilevered resonator; a voltage source connected to the capacitor for providing voltage V0 across the capacitor to produce an attractive force between movable plate and fixed plate; a circuit connecting the voltage source to the capacitor; and a load resistor in said circuit having a resistance RL satisfying the following equation: where: μ is at least 10; ω0 is the beam constant for the cantilevered resonator; c0 is the capacitance for the capacitor; and λ is the voltage dependent coupling parameter for voltage V0.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.