Microelectromechanical device with reset electrode
US7095545B2 · kind B2 · utility
11Cited by
9References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 2, 2004 |
| Grant date | Aug 22, 2006 |
| Priority date | — |
| Expiry date | Jul 27, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microelectromechanical device having a reset electrode for use in various devices including display devices such as those employing spatial light modulators. The device includes an optically transmissive substrate, a semiconductor substrate, and a member deflectable between a rest position and an operative position supported by one of the substrates. The deflectable member returns to an undeflected position by operation of the reset electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.