Fabrication of self-assembled monolayers
US7098145B2 · kind B2 · utility
7Cited by
3References
23Claims
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Key dates
| Filing date | Dec 4, 2001 |
| Grant date | Aug 29, 2006 |
| Priority date | — |
| Expiry date | Jan 13, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K85/701
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A self-assembled monolayer (SAM) is fabricated using either a semi-fluorinated sulphur containing compound, or a sem-fluorinated silane derivative and compressed carbon dioxide (CO2) as the solvent medium. The temperature and/or pressure of the compressed CO2 may be varied during the fabrication process to improve the molecular packing density of the monolayer.By using compressed CO2 as the solvent medium, monolayers with good molecular packing density can be fabricated relatively quickly without the use of environmentally unfriendly solvents.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.