X-ray inspection apparatus and X-ray inspection method
US7099432B2 · kind B2 · utility
27Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2004 |
| Grant date | Aug 29, 2006 |
| Priority date | — |
| Expiry date | Aug 23, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/419
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The X-ray inspection device and the X-ray inspection method according to the present invention are configured to hold an object to be inspected irradiated with an X-ray from an X-ray irradiation device, uses a swinging device for performing swinging motion of tilting the object to be inspected at an arbitrary angle and in an arbitrary direction, images the X-ray that passes through the object to be inspected in an X-ray detection device and extracts data of a desired cross section from the X-ray image of the X-ray detection device in a control device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.