MEMS device
US7102472B1 · kind B1 · utility
16Cited by
2References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 6, 2004 |
| Grant date | Sep 5, 2006 |
| Priority date | — |
| Expiry date | Jul 2, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0018
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A MEMS device having a support frame positioned on a substrate surrounding a first electrode. A rigid flange portion at the top of the support frame is closely space from, and is connected to, a second electrode by relatively short spring members. RF conductors connected to respective first and second electrodes complete an RF switch. A dielectric layer on the first electrode forms a capacitive type device and includes an electrostatic shield layer on its surface. This electrostatic shield layer is connected to ground by a multi megohm bleeder resistance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.