Method for fabricating a transducer
US7103949B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 6, 2003 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Jan 27, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/2196
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A method for fabricating a transducer suitable for a fluidic drive for a miniature acoustic-fluidic pump or mixer that includes an acoustic transducer attached to an exterior or interior of a fluidic circuit or reservoir. The transducer converts radio frequency electrical energy into an ultrasonic acoustic wave in a fluid that in turn generates directed fluid motion through the effect of acoustic streaming. The method includes depositing a piezo-electric thin-film onto a platinum coated silicon wafer or substrate with capping electrodes, defining each separate transducer; and dicing said piezoelectric tin-film to provide individual transducers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.