Multiaxial micromachined differential accelerometer
US7104128B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 10, 2004 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Nov 10, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/082
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a differential accelerometer micromachined in a plane plate, comprising a base and a differential measurement cell which includes a moveable seismic mass and two force sensors that are connected to the mass and to the base. Under the effect of an acceleration along Ox and/or Oy, Ox and Oy being directions orthogonal to the plane of the plate, the seismic mass is capable of undergoing linear displacement along a direction parallel to the acceleration, and has a center of gravity located at the intersection of a plane A1 perpendicular to the plane of the plate and passing through Ox and of a plane A2 perpendicular to the plane of the plate and passing through Oy; a first force sensor comprises, along Ox, two identical detection systems for a differential measurement of the linear displacement along Ox, and associated with each detection system a filtering system connected to the base, and a second force sensor comprises, along Oy, two other identical detection systems for the differential measurement of the linear displacement along Oy, and associated with each detection system a filtering system connected to the base, each filtering system allowing the assoc…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.