Patent · US Expired

Ultra-miniature accelerometers

US7104130B2 · kind B2 · utility

16Cited by

9References

17Claims

0Family size

Assignee

The Board of Trustees of the Leland Stanford Junior University · US

Inventors

Thomas Kenny · Redwood City, US
Woo Tae Park · Singapore, SG

Key dates

Filing date	Apr 9, 2004
Grant date	Sep 12, 2006
Priority date	—
Expiry date	Apr 9, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0817
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A miniaturized micromachined (MEMS) accelerometer-based sensor suitable for use in biological applications, such as a middle ear implant, is provided. An encapsulation layer is deposited on top of an accelerometer proof mass and flexure prior to release of the proof mass and flexure. The encapsulation layer protects the proof mass and flexure from subsequent processing steps, such as dicing and packaging, which enables fabrication of finished devices having reduced size. Surfaces within the accelerometer may be passivated after releasing the proof mass and flexure. Remote piezoresistive sensing is performed in order to provide low noise and reduced sensor head size.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.