Piezoelectric cantilever pressure sensor
US7104134B2 · kind B2 · utility
35Cited by
7References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 5, 2004 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Apr 22, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V40/1306
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A piezoelectric cantilever pressure sensor has a substrate and a piezoelectric cantilever having a base portion attached to the substrate and a beam portion suspended over a cavity. The piezoelectric cantilever contains a piezoelectric layer sandwiched between two electrodes and generates a measurable voltage when deformed under pressure. The piezoelectric cantilever pressure sensor can be manufactured at low cost and used in various applications including fingerprint identification devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.