Methods for manufacturing carbon fibers, electron-emitting device, electron source, image display apparatus, light bulb, and secondary battery using a thermal CVD method
US7104859B2 · kind B2 · utility
2Cited by
9References
23Claims
0Family size
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Key dates
| Filing date | Mar 18, 2004 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Aug 2, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2913
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In a method for manufacturing carbon fibers by means of a thermal CVD method through catalysts, the method capable of obtaining a uniform film thickness regardless of a growth position and a growth area on a substrate is provided. The substrate on which a catalyst layer is formed is disposed in a reaction container. An atmosphere in the reaction container is set to be a reduced pressure atmosphere including a carbon containing gas having a partial pressure of 10 Pa or less, and the substrate is heated in the atmosphere to grow carbon fibers on the catalyst layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.