Systems and methods for nanowire growth and harvesting
US7105428B2 · kind B2 · utility
125Cited by
52References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 29, 2005 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Apr 29, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/891
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.