Method and apparatus for analyzing the composition of an object
US7105813B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 25, 2004 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Oct 2, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/309
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ion analyzing apparatus for analyzing the composition of an object includes a chamber maintained under a vacuum, a support for supporting a plurality of objects disposed in the chamber, and a drive unit that selects one of the supported objects and rotates the selected object. An ion generator irradiates the rotating object with primary ions. A detector detects secondary ions emitted from the rotating object. An analyzer analyzes the secondary ions. A transfer device is connected to the supporter. The transfer device rotates the support or moves the support linearly in a horizontal direction to place an object at a predetermined position at which the object is selected and rotated by the drive unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.