Megasonic transducer with focused energy resonator
US7105985B2 · kind B2 · utility
5Cited by
18References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2001 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Jan 1, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/202
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A transducer comprised of a resonator and a piezoelectric crystal for cleaning single items such as semiconductor wafers and flat panel displays. The resonator is an elongated piece of material having a cross section that is trapezoidal in shape. The parallel sides of the trapezoid form the top and bottom ends of the resonator and the nonparallel sides of the trapezoid focus the acoustic energy on the bottom end of the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.