Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer
US7106441B2 · kind B2 · utility
11Cited by
2References
16Claims
0Family size
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Key dates
| Filing date | Sep 26, 2003 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Aug 31, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tunable microelectromechanical (MEMS) spectrophotometer with a rotating cylindrical reflective diffraction grating is integrated with a photodetector and an optical fiber light source on a Rowland circle on a monolithic silicon substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.