Frequency splitting laser micrometer
US7106451B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 2003 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | May 6, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/266
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A frequency splitting laser micrometer for measuring a displacement of an object. The laser micrometer includes a frequency splitting laser directing a first frequency splitting laser beam to the object via a laser output mirror at one end of the laser. The first laser beam is reflected thus outputting a second frequency splitting laser beam, such that a feedback cavity is created, wherein a frequency of the second laser beam is decided by a cavity length of said feedback cavity and accordingly the displacement of the object. A detecting and signal processing unit receives said first and second frequency splitting laser beams and measures the displacement of the object according to interference effects of said first and second laser beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.