Angular rate sensor using micro electromechanical haltere
US7107842B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 2004 |
| Grant date | Sep 19, 2006 |
| Priority date | — |
| Expiry date | May 3, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/56
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular rate sensing system suitable for a micromechanical flying insect (MFI) device. The system includes a rod, or haltere, that is moved in a plane by a piezoelectric actuator. Bending of the haltere due to angular movement of a body onto which the haltere is coupled is sensed with a resistive strain gage. In a first embodiment the haltere is actuated (i.e., made to beat or sweep) by simple coupling to an actuator. In a second embodiment, a four-bar structure is used to amplify the motion of a piezoelectric bender to cause haltere beating. Another embodiment achieves haltere beating by parasitic transmission of vibrations of the MFI body to the base of the haltere.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.