Membrane for capacitive vacuum measuring cell
US7107855B2 · kind B2 · utility
11Cited by
21References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 7, 2003 |
| Grant date | Sep 19, 2006 |
| Priority date | — |
| Expiry date | Aug 24, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0044
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 μm, in particular less than 120 μm. The membrane is produced from a ribbon-shaped green body of Al2O3, and is given high planarity by smoothing the membrane after sintering. The green body is sintered at a sintering temperature that is higher than the smoothing temperature applied following sintering.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.