Particle beam device

US7109487B2 · kind B2 · utility

Assignee

• Carl Zeiss NTS GmbH · US

Inventors

• Martin Kienle · Ellwangen, DE
• Helmut Muller · Schwäbisch Gmünd, DE
• Peter Hoffrogge · Oberkochen, DE
• Wilhelm Bolsinger · Dischingen, DE

Key dates

• Filing date: Oct 26, 2004
• Grant date: Sep 19, 2006
• Expiry date: Oct 26, 2024

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/20207
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A particle beam device, in particular an electron microscope, having at least two particle beam columns and one object slide having a receiving surface for receiving an object. The particle beam device makes it possible to align the surface of the object perpendicular to the beam axes of the particle beam columns, using simple means, in an accurate and error-free manner. The object slide assumes a basic position from which it may be tilted into the position in which the first or the second beam axis is perpendicular or at least almost perpendicular to the receiving surface of the object slide. In the basic position, a normal to the receiving surface of the object slide is spatially oriented such that an angle formed between the first beam axis and the normal is greater than or equal to an angle formed between the second beam axis and the normal.