Reconfigurable microphotonics devices via deformable membrane platforms
US7110628B2 · kind B2 · utility
4Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2003 |
| Grant date | Sep 19, 2006 |
| Priority date | — |
| Expiry date | Jul 14, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/0128
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microphotonic device is provided. The microphotonic device includes a membrane structure that can experience strain. A waveguide element is formed on the membrane structure so that when the membrane structure is strained, the waveguide element elements are tuned to a selective amount.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.