Microdischarge devices and arrays having tapered microcavities
US7112918B2 · kind B2 · utility
26Cited by
22References
55Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2002 |
| Grant date | Sep 26, 2006 |
| Priority date | — |
| Expiry date | May 10, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J61/62
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.