Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials
US7115305B2 · kind B2 · utility
491Cited by
63References
40Claims
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Key dates
| Filing date | Jan 30, 2003 |
| Grant date | Oct 3, 2006 |
| Priority date | — |
| Expiry date | Jul 23, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/844
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of forming a periodic array of nano-scale objects using a block copolymer, and nano-scale object arrays formed from the method are provided. The method for forming the arrays generally includes the steps of depositing a block copolymer of at least two blocks on a substrate to form an ordered meso-scale structured array of the polymer materials, forming catalytic metal dots based on the meso-scale structure, and growing nano-scale objects on the catalytic dots to form an ordered array of nano-scale objects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.